Ulsi Technology
C. Y. Chang, S. M. Sze
This text follows the tradition of Sze's highly successful pioneering text on VLSI technology and is updated with the latest advances in the field of microelectronic chip fabrication. Since computer chips are foundations of modern electronics, these topics are essential for the next generation of USLI technologies, allowing more transistors to be packaged on a single chip. Contributing to each chapter are industry experts, specializing in topics such as epitaxy with low temperature process, rapid thermal processes, low damage plasma reactive ion etching, fine line litography, cleaning technology, clean room technology, packing and reliability.
Thể loại:
Năm:
1996
Nhà xuát bản:
McGraw-Hill Inc.,US
Ngôn ngữ:
english
Trang:
751
ISBN 10:
0070630623
ISBN 13:
9780070630628
Loạt:
Mcgraw Hill Series in Electrical and Computer Engineering
File:
DJVU, 7.17 MB
IPFS:
,
english, 1996
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